@article{Sun Shuaishuai_287, author = {Sun Shuaishuai, Huang Guoqiang}, title = {Simulation of Reactive Distillation Process for Monosilane Production via Redistribution of Trichlorosilane}, publisher = {Chinese Journal of Chemical Engineering}, year = {2014}, journal = {Chinese Journal of Chemical Engineering}, volume = {22}, number = {3}, eid = {287}, pages = {287-293}, keywords = {

reactive distillation;reaction kinetics;trichlorosilane redistribution;pumparound;monosilane

}, doi = https://cjche.cip.com.cn/EN/10.1016/S1004-9541(14)60045-8 }