TY - Chinese Journal of Chemical Engineering A1 - Sun Shuaishuai, Huang Guoqiang T1 - Simulation of Reactive Distillation Process for Monosilane Production via Redistribution of Trichlorosilane Y1 - 2014-03-05 11:10:31.857 JF - Chinese Journal of Chemical Engineering JO - Chinese Journal of Chemical Engineering SP - 287 EP - 293 VL - 22 IS - 3 UR - {https://cjche.cip.com.cn/EN/10.1016/S1004-9541(14)60045-8} N1 - 10.1016/S1004-9541(14)60045-8 ER -