Thermodynamic analysis of manufacturing polysilicon from SiHCl<sub>3</sub>, SiCl<sub>4</sub> and H<sub>2</sub>

Thermodynamic analysis of manufacturing polysilicon from SiHCl₃, SiCl₄ and H₂

Peilong Li, Tiefeng Wang

Chin.J.Chem.Eng. . 2015, (4): 681 -688 . DOI: 10.1016/j.cjche.2014.03.005