Spatial batch optimal design based on self-learning gaussian process models for LPCVD processes

Spatial batch optimal design based on self-learning gaussian process models for LPCVD processes

Pei Sun, Lei Xie, Junghui Chen

Chin.J.Chem.Eng. . 2015, (12): 1958 -1964 . DOI: 10.1016/j.cjche.2015.11.013