Abstract: Use of ultraporous nylon membrane is one of the most widely employed techniques for removal of hard and soft nanoparticles in the semiconductor industry, and the accurate determination of membrane pore size is necessary in order to avoid manufacturing defects caused by contamination. The gold nanoparticle has several benefits for the evaluation of polymeric membranes; however, the nanoparticles agglomerate easily on the nylon membrane and make it difficult to evaluate the membrane precisely. The properties of 2-amino-2-hydroxymethyl-1,3-propanediol (ADP) ligand in gold nanoparticle solution were systematically investigated, and ADP was utilized for improved evaluation of the nylon membranes. Nylon membrane used in this study was prepared by phase inversion techniques. Ultrathin dense layer on top of the membrane surface and Darcy structures in the microporous membrane support were observed. The gold particle rejection was carried out at various pH values from 4 to 14 and higher rejection was observed at pH 4 and 8. The suppression of gold colloid agglomeration using ADP and monodispersity of gold colloids was also analyzed by confocal laser scanning microscopy (CLSM), transmission electron microscopy (TEM), and scanning electron microscopy (SEM). van der Waals interaction energy of the particles was reduced in the addition of ADP. The presence of ADP ligand in the gold solutions prevented the agglomeration of gold nanoparticles and reduced the adsorption of the particles on the nylon membrane surface, leading to precise evaluation of membrane pore sizes.

Key words: Particle size, Electron microscopy, Gold colloid flock, Semiconductor

摘要： Use of ultraporous nylon membrane is one of the most widely employed techniques for removal of hard and soft nanoparticles in the semiconductor industry, and the accurate determination of membrane pore size is necessary in order to avoid manufacturing defects caused by contamination. The gold nanoparticle has several benefits for the evaluation of polymeric membranes; however, the nanoparticles agglomerate easily on the nylon membrane and make it difficult to evaluate the membrane precisely. The properties of 2-amino-2-hydroxymethyl-1,3-propanediol (ADP) ligand in gold nanoparticle solution were systematically investigated, and ADP was utilized for improved evaluation of the nylon membranes. Nylon membrane used in this study was prepared by phase inversion techniques. Ultrathin dense layer on top of the membrane surface and Darcy structures in the microporous membrane support were observed. The gold particle rejection was carried out at various pH values from 4 to 14 and higher rejection was observed at pH 4 and 8. The suppression of gold colloid agglomeration using ADP and monodispersity of gold colloids was also analyzed by confocal laser scanning microscopy (CLSM), transmission electron microscopy (TEM), and scanning electron microscopy (SEM). van der Waals interaction energy of the particles was reduced in the addition of ADP. The presence of ADP ligand in the gold solutions prevented the agglomeration of gold nanoparticles and reduced the adsorption of the particles on the nylon membrane surface, leading to precise evaluation of membrane pore sizes.

关键词: Particle size, Electron microscopy, Gold colloid flock, Semiconductor