Bottleneck Prediction Method Based on Improved Adaptive Network-based Fuzzy Inference System (ANFIS) in Semiconductor Manufacturing System<sup>*</sup>

曹政才, 邓积杰, 刘民, 王永吉

Bottleneck Prediction Method Based on Improved Adaptive Network-based Fuzzy Inference System (ANFIS) in Semiconductor Manufacturing System^*

CAO Zhengcai, DENG Jijie, LIU Min, WANG Yongji

Chinese Journal of Chemical Engineering . 2012, (6): 1081 -1088 .