Thermodynamic behaviors of SiCl<sub>2</sub> in silicon deposition by gas phase zinc reduction of silicon tetrachloride

Yanqing Hou, Zhifeng Nie, Gang Xie, Rongxing Li, Xiaohua Yu, Plant A. Ramachandran

Thermodynamic behaviors of SiCl₂ in silicon deposition by gas phase zinc reduction of silicon tetrachloride

Yanqing Hou, Zhifeng Nie, Gang Xie, Rongxing Li, Xiaohua Yu, Plant A. Ramachandran

. 2015, (3): 552 -558 . DOI: 10.1016/j.cjche.2014.04.001