Hydrogenation of Silicon Tetrachloride in Microwave Plasma

doi:10.1016/S1004-9541(14)60025-2

Abstract

Abstract: This study investigated the hydrogenation of silicon tetrachloride (SiCl₄) in microwave plasma. A new launcher of argon (Ar) and hydrogen (H₂) plasma was introduced to produce a non-thermodynamic equilibrium activation plasma. The plasma state exhibited a characteristic temperature related to the equilibrium constant, which was termed "Reactive Temperature" in this study. Thus, the hydrogenation of SiCl₄ in the plasma could easily be handled with high conversion ratio and very high selectivity to trichlorosilane (SiHCl₃). The effects of SiCl₄/Ar and H₂/Ar ratios on the conversion were also investigated using a mathematical model developed to determine the optimum experimental parameters. The highest hydrogenation conversion ratio was produced at a H₂/SiCl₄ molar ratio of 1, with mixtures of SiCl₄ and H₂ to Ar molar ratio of 1.2 to 1.4. In this plasma, the special system pressure and incident power were required for the highest energy efficiency of hydrogenating SiCl₄, while the optimum system pressure varies from 26.6 to 40 kPa depending on input power, and the optimum feed gas (H₂ and SiCl₄) molar energy input was about 350 kJ·mol^-1.

Key words: hydrogenation, silicon tetrachloride, non-thermodynamic equilibrium plasma, equilibrium constant, plasma temperature

摘要： This study investigated the hydrogenation of silicon tetrachloride (SiCl₄) in microwave plasma. A new launcher of argon (Ar) and hydrogen (H₂) plasma was introduced to produce a non-thermodynamic equilibrium activation plasma. The plasma state exhibited a characteristic temperature related to the equilibrium constant, which was termed "Reactive Temperature" in this study. Thus, the hydrogenation of SiCl₄ in the plasma could easily be handled with high conversion ratio and very high selectivity to trichlorosilane (SiHCl₃). The effects of SiCl₄/Ar and H₂/Ar ratios on the conversion were also investigated using a mathematical model developed to determine the optimum experimental parameters. The highest hydrogenation conversion ratio was produced at a H₂/SiCl₄ molar ratio of 1, with mixtures of SiCl₄ and H₂ to Ar molar ratio of 1.2 to 1.4. In this plasma, the special system pressure and incident power were required for the highest energy efficiency of hydrogenating SiCl₄, while the optimum system pressure varies from 26.6 to 40 kPa depending on input power, and the optimum feed gas (H₂ and SiCl₄) molar energy input was about 350 kJ·mol^-1.

关键词: hydrogenation, silicon tetrachloride, non-thermodynamic equilibrium plasma, equilibrium constant, plasma temperature

LU Zhenxi, ZHANG Weigang. Hydrogenation of Silicon Tetrachloride in Microwave Plasma[J]. Chin.J.Chem.Eng., 2014, 22(2): 227-233.

卢振西, 张伟刚. Hydrogenation of Silicon Tetrachloride in Microwave Plasma[J]. Chinese Journal of Chemical Engineering, 2014, 22(2): 227-233.

References

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