Simulation of Reactive Distillation Process for Monosilane Production <em>via</em> Redistribution of Trichlorosilane

孙帅帅, 黄国强

Simulation of Reactive Distillation Process for Monosilane Production via Redistribution of Trichlorosilane

Sun Shuaishuai, Huang Guoqiang

Chinese Journal of Chemical Engineering . 2014, (3): 287 -293 . DOI: 10.1016/S1004-9541(14)60045-8