1 O'mara, W.C., Herring, R.B., Hunt, L.P., Handbook of Semiconductor Silicon Technology, William Andrew, New Jersey (1990).2 Luyben, W.L., Yu, C.C., Reactive Distillation Design and Control, John Wiley &Sons, Inc, New Jersey (2008).3 Sundmacher, K., Kienle, A., Reactive Distillation: Status and Future Directions, Wiley-VCH Weinheim, Magdeburg (2003).4 Luyben, W.L., Distillation Design and Control Using AspenTM Simulation, John Wiley & Sons, Inc, New Jersey (2006).5 Taylor, R., Krishna, R., "Modelling reactive distillation", Chem. Eng. Sci., 55 (22), 5183-5229 (2000).6 Malone, M.F., Doherty, M.F., "Reactive distillation", Ind. Eng. Chem. Res., 39 (11), 3953-3957 (2000).7 Bakay, C.J., "Process for making silane", US Pat., 3968199 (1976).8 Block, H.D., Leimkuhler, H.J., Muller, D., Sch Fer, J.P., Ronge, G., "Method and system for producing silane", US Pat., 6905576 B1 (2005).9 Muller, D., Ronge, G., SchaFer, J.P., Leimkuhler, H.J., Strauss, U., Block, H.D., "Method and facility for producing silane", US Pat., 6942844B2 (2005).10 Sonnenschein, R., Adler, P., Kasatkin, Y., Petrik, A., Schwarzmann, L., "Process for producing monosilane", US Pat., 2009/0155156A1 (2006).11 Muller, D., Ronge, G., Sch Fer, J.P., Leimkuhler, H.J., "Development and economic evaluation of a reactive distillation process for silane production", In: International Conference on Distillation & Absorption, Kongresshaus, Baden-Baden, Germany (2002).12 Li, K.Y., Huang, C.D., "Redistribution reaction of trichlorosilane in a fixed-bed reactor", Ind. Eng. Chem. Res., 27 (9), 1600-1606 (1988).13 Plahutnik, F., Arvidson, A., Sawyer, D., Sharp, K., "Development of a polysilicon process based on chemical vapor deposition (phase 1 & phase 2)", NASA-CR-173957 (1982).14 Breneman, W.C., Farrier, E.G., Morihara, H., "Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon", NASA-CR-158585 (1978).15 Kota, N.R., "Study of silane production", Master Dissertation, Lamar University, Beaumont (2009).16 Sonnenschein, R., Adler, P., Popken, T., Kahsnitz, J., "Apparatus and process for preparing silanes", US Pat., 2008/0095691 A1 (2005).17 Ratheesh, S., Kannan, A., "Holdup and pressure drop studies in structured packings with catalysts", Chem. Eng. J., 104 (1-3), 45-54 (2004).18 Moritz, Peter, Hasse, Hans., "Fluid dynamics in reactive distillation packing Katapak®-S", Chem. Eng. Sci., 54 (10), 1367-1374 (1999).19 Xu, X.E., Zhao, Z.H., Tian, S.J., "Study on catalytic distillation processes: Part Ⅲ: Prediction of pressure drop and holdup in catalyst bed", Chem. Eng. Res. Des., 75 (6), 625-629 (1997).20 Cai, J.L., Cui, X.B.,Yang, Z.C., "Simulation for transesterification of methyl acetate and n-butanol in a reactive and extractive distillation column using ionic liquids as entrainer and catalyst", Chin. J. Chem. Eng., 19 (5), 754-762 (2011).21 Kumar, S., "Modelling and simulation of ethyl acetate reactive distillation column using ASPEN PLUS", Bachelor Thesis, National Institiute of Technology, India (2010). |