Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering

›› 2011, Vol. 19 ›› Issue (2): 179-184.

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Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering

杨加志¹, 赵成刚², 刘晓丽¹, 于俊伟¹, 孙东平¹, 唐卫华¹

1. School of Chemistry and Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China;
2. School of Mechanical Engineering, Anyang Institute of Technology, Anyang 455000, China

收稿日期:2010-06-03 修回日期:2010-12-04 出版日期:2011-04-28 发布日期:2011-04-28
通讯作者: SUN Dongping, E-mail:dongpingsun@163.com;TANG Weihua,whtang@mail.njust.edu.cn
基金资助:
Supported by the National Natural Science Foundation of China (10776014);Nanjing University of Science and Technology (NUST) Research Funding

Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering

YANG Jiazhi¹, ZHAO Chenggang², LIU Xiaoli¹, YU Junwei¹, SUN Dongping¹, TANG Weihua¹

1. School of Chemistry and Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China;
2. School of Mechanical Engineering, Anyang Institute of Technology, Anyang 455000, China

Received:2010-06-03 Revised:2010-12-04 Online:2011-04-28 Published:2011-04-28
Supported by:
Supported by the National Natural Science Foundation of China (10776014);Nanjing University of Science and Technology (NUST) Research Funding

摘要/Abstract

摘要： Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide (ITO) electrodes.Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency (RF) magnetron sputtering.The optimum ITO deposition conditions were achieved by examining crystalline structure,surface morphology and optoelectrical characteristics with X-ray diffraction (XRD),scanning electron microscopy (SEM),atomic force microscopy (AFM),and UV spectroscopy.The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated.The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content (O₂/Ar,volume ratio) in the sputtering chamber.And the ITO crystalline structure directly determines the conductivity of ITO-deposited films.High conductive [sheet resis-tance ～120 Ω·square^-1 (Ω·sq^-1)] and transparent (above 76%) ITO thin films (240 nm thick) were obtained with a moderate sputtering power (about 60 W) and with an oxygen flow rate of 0.25 ml·min^-1 (sccm) during the deposition.These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices.

关键词: thin films, magnetron sputtering, microbial cellulose membrane, optical properties, indium tin oxide

Abstract: Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide (ITO) electrodes.Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency (RF) magnetron sputtering.The optimum ITO deposition conditions were achieved by examining crystalline structure,surface morphology and optoelectrical characteristics with X-ray diffraction (XRD),scanning electron microscopy (SEM),atomic force microscopy (AFM),and UV spectroscopy.The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated.The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content (O₂/Ar,volume ratio) in the sputtering chamber.And the ITO crystalline structure directly determines the conductivity of ITO-deposited films.High conductive [sheet resis-tance ～120 Ω·square^-1 (Ω·sq^-1)] and transparent (above 76%) ITO thin films (240 nm thick) were obtained with a moderate sputtering power (about 60 W) and with an oxygen flow rate of 0.25 ml·min^-1 (sccm) during the deposition.These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices.

Key words: thin films, magnetron sputtering, microbial cellulose membrane, optical properties, indium tin oxide

杨加志, 赵成刚, 刘晓丽, 于俊伟, 孙东平, 唐卫华. Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering[J]. , 2011, 19(2): 179-184.

YANG Jiazhi, ZHAO Chenggang, LIU Xiaoli, YU Junwei, SUN Dongping, TANG Weihua. Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering[J]. , 2011, 19(2): 179-184.

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Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering

Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering

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