SCI和EI收录∣中国化工学会会刊

Chinese Journal of Chemical Engineering ›› 2015, Vol. 23 ›› Issue (4): 681-688.DOI: 10.1016/j.cjche.2014.03.005

• 化工热力学 • 上一篇    下一篇

Thermodynamic analysis of manufacturing polysilicon from SiHCl3, SiCl4 and H2

Peilong Li, Tiefeng Wang   

  1. Beijing Key Laboratory of Green Reaction Engineering and Technology, Department of Chemical Engineering, Tsinghua University, Beijing 100084, China
  • 收稿日期:2013-12-03 修回日期:2014-03-13 出版日期:2015-04-28 发布日期:2015-05-13
  • 通讯作者: Tiefeng Wang
  • 基金资助:

    Supported by the Beijing New Star Project on Science & Technology of China (2009B35) and the Program for New Century Excellent Talents in University (NCET-12-0297).

Thermodynamic analysis of manufacturing polysilicon from SiHCl3, SiCl4 and H2

Peilong Li, Tiefeng Wang   

  1. Beijing Key Laboratory of Green Reaction Engineering and Technology, Department of Chemical Engineering, Tsinghua University, Beijing 100084, China
  • Received:2013-12-03 Revised:2014-03-13 Online:2015-04-28 Published:2015-05-13
  • Contact: Tiefeng Wang
  • Supported by:

    Supported by the Beijing New Star Project on Science & Technology of China (2009B35) and the Program for New Century Excellent Talents in University (NCET-12-0297).

摘要: Production of polysilicon by chemical vapor deposition of SiHCl3 with a fluidized bed reactor is a competitive technology. As equilibrium conversion can be approached in a fluidized bed reactor, a reliable thermodynamic analysis is very important. However, inconsistent thermodynamic analysis results have been reported in the literature. The present work studied the effects of thermodynamic data and species selection, and recommended that JANAF was the best Cp data source and the minimum set of species included the following eight species: H2, HCl, SiCl4, SiCl2, SiHCl3, SiH2Cl2, SiH3Cl and Si. Then, the influence of operating conditions on the equilibrium was studied. For the SiHCl3-H2 system, both the yield of silicon and selectivity to silicon reached their maximum at (up to 1100 ℃), and low pressure and high H2 feed ratiowere of benefit for silicon production. For the SiHCl3- SiCl4-H2 system, silicon could be produced only at 900-1400 ℃, and reducing pressure and increasing H2 feed ratio enhanced the yield of silicon.Meanwhile, the operation map for zero net by-production of SiCl4 by directly recycling the produced SiCl4 was determined.

关键词: Thermodynamics, Polysilicon, Fluidized bed, Trichlorosilane, Silicon tetrachloride

Abstract: Production of polysilicon by chemical vapor deposition of SiHCl3 with a fluidized bed reactor is a competitive technology. As equilibrium conversion can be approached in a fluidized bed reactor, a reliable thermodynamic analysis is very important. However, inconsistent thermodynamic analysis results have been reported in the literature. The present work studied the effects of thermodynamic data and species selection, and recommended that JANAF was the best Cp data source and the minimum set of species included the following eight species: H2, HCl, SiCl4, SiCl2, SiHCl3, SiH2Cl2, SiH3Cl and Si. Then, the influence of operating conditions on the equilibrium was studied. For the SiHCl3-H2 system, both the yield of silicon and selectivity to silicon reached their maximum at (up to 1100 ℃), and low pressure and high H2 feed ratiowere of benefit for silicon production. For the SiHCl3- SiCl4-H2 system, silicon could be produced only at 900-1400 ℃, and reducing pressure and increasing H2 feed ratio enhanced the yield of silicon.Meanwhile, the operation map for zero net by-production of SiCl4 by directly recycling the produced SiCl4 was determined.

Key words: Thermodynamics, Polysilicon, Fluidized bed, Trichlorosilane, Silicon tetrachloride