SCI和EI收录∣中国化工学会会刊

›› 2017, Vol. 25 ›› Issue (7): 931-937.DOI: 10.1016/j.cjche.2017.01.009

• Separation Science and Engineering • 上一篇    下一篇

Suppression of gold nanoparticle agglomeration and its separation via nylon membranes

Ayyavoo Jayalakshmi1, In-Chul Kim3, Young-Nam Kwon1,2   

  1. 1 School of Urban and Environmental Engineering, Ulsan National Institute of Science and Technology, Ulsan 689-798, Korea;
    2 KIST-UNIST Ulsan Center for Convergent Materials, UNIST(Ulsan National Institute of Science and Technology), Korea;
    3 Environment and Resources Research Center, Korea Research Institute Chemical Technology, Daejeon 305-606, Korea
  • 收稿日期:2016-10-21 修回日期:2017-01-15 出版日期:2017-07-28 发布日期:2017-08-17
  • 通讯作者: Young-Nam Kwon,E-mail address:kwonyn@unist.ac.kr
  • 基金资助:
    Supported by the MOTIE (Ministry of Trade, Industry and Energy) (10048995) and KSRC (Korea Semiconductor Research Consortium) support program for the development of the future semiconductor device, and supported by the KIST-UNIST Partnership Program (1.150091.01/2V04470).

Suppression of gold nanoparticle agglomeration and its separation via nylon membranes

Ayyavoo Jayalakshmi1, In-Chul Kim3, Young-Nam Kwon1,2   

  1. 1 School of Urban and Environmental Engineering, Ulsan National Institute of Science and Technology, Ulsan 689-798, Korea;
    2 KIST-UNIST Ulsan Center for Convergent Materials, UNIST(Ulsan National Institute of Science and Technology), Korea;
    3 Environment and Resources Research Center, Korea Research Institute Chemical Technology, Daejeon 305-606, Korea
  • Received:2016-10-21 Revised:2017-01-15 Online:2017-07-28 Published:2017-08-17
  • Supported by:
    Supported by the MOTIE (Ministry of Trade, Industry and Energy) (10048995) and KSRC (Korea Semiconductor Research Consortium) support program for the development of the future semiconductor device, and supported by the KIST-UNIST Partnership Program (1.150091.01/2V04470).

摘要: Use of ultraporous nylon membrane is one of the most widely employed techniques for removal of hard and soft nanoparticles in the semiconductor industry, and the accurate determination of membrane pore size is necessary in order to avoid manufacturing defects caused by contamination. The gold nanoparticle has several benefits for the evaluation of polymeric membranes; however, the nanoparticles agglomerate easily on the nylon membrane and make it difficult to evaluate the membrane precisely. The properties of 2-amino-2-hydroxymethyl-1,3-propanediol (ADP) ligand in gold nanoparticle solution were systematically investigated, and ADP was utilized for improved evaluation of the nylon membranes. Nylon membrane used in this study was prepared by phase inversion techniques. Ultrathin dense layer on top of the membrane surface and Darcy structures in the microporous membrane support were observed. The gold particle rejection was carried out at various pH values from 4 to 14 and higher rejection was observed at pH 4 and 8. The suppression of gold colloid agglomeration using ADP and monodispersity of gold colloids was also analyzed by confocal laser scanning microscopy (CLSM), transmission electron microscopy (TEM), and scanning electron microscopy (SEM). van der Waals interaction energy of the particles was reduced in the addition of ADP. The presence of ADP ligand in the gold solutions prevented the agglomeration of gold nanoparticles and reduced the adsorption of the particles on the nylon membrane surface, leading to precise evaluation of membrane pore sizes.

关键词: Particle size, Electron microscopy, Gold colloid flock, Semiconductor

Abstract: Use of ultraporous nylon membrane is one of the most widely employed techniques for removal of hard and soft nanoparticles in the semiconductor industry, and the accurate determination of membrane pore size is necessary in order to avoid manufacturing defects caused by contamination. The gold nanoparticle has several benefits for the evaluation of polymeric membranes; however, the nanoparticles agglomerate easily on the nylon membrane and make it difficult to evaluate the membrane precisely. The properties of 2-amino-2-hydroxymethyl-1,3-propanediol (ADP) ligand in gold nanoparticle solution were systematically investigated, and ADP was utilized for improved evaluation of the nylon membranes. Nylon membrane used in this study was prepared by phase inversion techniques. Ultrathin dense layer on top of the membrane surface and Darcy structures in the microporous membrane support were observed. The gold particle rejection was carried out at various pH values from 4 to 14 and higher rejection was observed at pH 4 and 8. The suppression of gold colloid agglomeration using ADP and monodispersity of gold colloids was also analyzed by confocal laser scanning microscopy (CLSM), transmission electron microscopy (TEM), and scanning electron microscopy (SEM). van der Waals interaction energy of the particles was reduced in the addition of ADP. The presence of ADP ligand in the gold solutions prevented the agglomeration of gold nanoparticles and reduced the adsorption of the particles on the nylon membrane surface, leading to precise evaluation of membrane pore sizes.

Key words: Particle size, Electron microscopy, Gold colloid flock, Semiconductor