The Al2O3 and Mn/Al2O3 sorbents highly utilized in destructive sorption of NF3

doi:10.1016/j.cjche.2023.07.005

中国化学工程学报 ›› 2024, Vol. 65 ›› Issue (1): 54-62.DOI: 10.1016/j.cjche.2023.07.005

• Full Length Article • 上一篇下一篇

The Al₂O₃ and Mn/Al₂O₃ sorbents highly utilized in destructive sorption of NF₃

Yanfei Pan, Hejian Li, Li Zheng, Xiufeng Xu

School of Chemistry and Chemical Engineering, Yantai University, Yantai 264005, China

收稿日期:2023-05-18 修回日期:2023-07-30 出版日期:2024-01-28 发布日期:2024-04-17
通讯作者: Xiufeng Xu,E-mail:xxf@ytu.edu.cn
基金资助:
The financial support from the Natural Science Foundation of Shandong Province (ZR2020KB003) is gratefully acknowledged.

The Al₂O₃ and Mn/Al₂O₃ sorbents highly utilized in destructive sorption of NF₃

Yanfei Pan, Hejian Li, Li Zheng, Xiufeng Xu

School of Chemistry and Chemical Engineering, Yantai University, Yantai 264005, China

Received:2023-05-18 Revised:2023-07-30 Online:2024-01-28 Published:2024-04-17
Contact: Xiufeng Xu,E-mail:xxf@ytu.edu.cn
Supported by:
The financial support from the Natural Science Foundation of Shandong Province (ZR2020KB003) is gratefully acknowledged.

摘要/Abstract

摘要： NF₃ is commonly used as an etching and cleaning gas in semiconductor industry, however it is a strongly greenhouse gas. Therefore, the destruction of disposal NF₃ is an urgent task to migrate the greenhouse effect. Among the technologies for NF₃ abatement, the destructive sorption of NF₃ over metal oxides sor bents is an effective way. Thus, the search for a highly reactive and utilized sorbent for NF₃ destruction is in great demand. In this work, AlOOH supported on carbon-sphere (AlOOH/CS) as precursors were syn thesized hydrothermally and heat-treated to prepare the Al₂O₃ sorbents. The influence of AlOOH/CS hydrothermal temperatures on the reactivity of derived Al₂O₃ sorbents for NF₃ destruction was investi gated, and it is shown that the Al₂O₃ from AlOOH/CS hydro-thermalized at 120℃ is superior to others. Subsequently, the optimized Al₂O₃ was covered by Mn(OH)_x to prepare Mn/Al₂O₃ sorbents via changing hydrothermal temperatures and Mn loadings. The results show that the Mn/Al₂O₃ sorbents are more uti lized than bare Al₂O₃ in NF₃ destructive sorption due to the promotional effect of Mn₂O₃ as surface layer on the fluorination of Al₂O₃ as substrate, especially the optimal 5%Mn/Al₂O₃(160 ℃) exhibits a utilization percentage as high as 90.4%, and remarkably exceeds all the sorbents reported so far. These findings are beneficial to develop more efficient sorbents for the destruction of NF₃.

关键词: Greenhouse gas, NF₃ destructive sorption, Sorbents, Al₂O₃, Mn/Al₂O₃ Reactivity

Abstract: NF₃ is commonly used as an etching and cleaning gas in semiconductor industry, however it is a strongly greenhouse gas. Therefore, the destruction of disposal NF₃ is an urgent task to migrate the greenhouse effect. Among the technologies for NF₃ abatement, the destructive sorption of NF₃ over metal oxides sor bents is an effective way. Thus, the search for a highly reactive and utilized sorbent for NF₃ destruction is in great demand. In this work, AlOOH supported on carbon-sphere (AlOOH/CS) as precursors were syn thesized hydrothermally and heat-treated to prepare the Al₂O₃ sorbents. The influence of AlOOH/CS hydrothermal temperatures on the reactivity of derived Al₂O₃ sorbents for NF₃ destruction was investi gated, and it is shown that the Al₂O₃ from AlOOH/CS hydro-thermalized at 120℃ is superior to others. Subsequently, the optimized Al₂O₃ was covered by Mn(OH)_x to prepare Mn/Al₂O₃ sorbents via changing hydrothermal temperatures and Mn loadings. The results show that the Mn/Al₂O₃ sorbents are more uti lized than bare Al₂O₃ in NF₃ destructive sorption due to the promotional effect of Mn₂O₃ as surface layer on the fluorination of Al₂O₃ as substrate, especially the optimal 5%Mn/Al₂O₃(160 ℃) exhibits a utilization percentage as high as 90.4%, and remarkably exceeds all the sorbents reported so far. These findings are beneficial to develop more efficient sorbents for the destruction of NF₃.

Key words: Greenhouse gas, NF₃ destructive sorption, Sorbents, Al₂O₃, Mn/Al₂O₃ Reactivity

Yanfei Pan, Hejian Li, Li Zheng, Xiufeng Xu. The Al₂O₃ and Mn/Al₂O₃ sorbents highly utilized in destructive sorption of NF₃[J]. 中国化学工程学报, 2024, 65(1): 54-62.

Yanfei Pan, Hejian Li, Li Zheng, Xiufeng Xu. The Al₂O₃ and Mn/Al₂O₃ sorbents highly utilized in destructive sorption of NF₃[J]. Chinese Journal of Chemical Engineering, 2024, 65(1): 54-62.

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The Al₂O₃ and Mn/Al₂O₃ sorbents highly utilized in destructive sorption of NF₃

The Al₂O₃ and Mn/Al₂O₃ sorbents highly utilized in destructive sorption of NF₃

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